Prof. Y. Nemirovsky's Home Page

Yael Nemirovsky

office: Electrical Engineering, 7th floor, room no. 709, Mayer building

Tel: 972-4-8294688, Fax: 972-4-8323041
email: nemirov@ee.technion.ac.il

For MEMS prototype devices fabricated at the Technion please click here

For more linkages - klick MEMS Activity

A DECADE OF MEMS (1991-2001)

Associate Prof. Yael Nemirovsky-a Short Resume

B.Sc. 1966, D.Sc. 1971 (Technion)

IEEE Fellow, IEE Fellow.

Yael Nemirovsky joined the Dept. of Electrical Engineering in 1980. Prior to that she was a research scientist specializing in microelectronics in Rafael, a national R&D organization. She graduated from Technion in chemistry and her D.Sc. thesis was in electrochemistry.

For over 20 years she has been active in electro-optical devices in II-VI compound semiconductors and additional advanced semiconductor materials as well as infrared focal plane arrays. She has been involved in growth, processing, device design and modeling of detectors as well as VLSI circuits. She has a well-equipped MOCVD laboratory for growth of heterostructures, extensive facilities for device and interfaces processing and characterization. She has been a principal investigator in large funded research programs that ended in prototype infrared detectors and systems that were transferred to industry. Twice she was the head of the microelectronics research center of the Dept. of EE. at Technion.

Currently her research focuses on Micro-Opto-Electro-Mechanical Systems (MOEMS), CMOS compatible micro machining and microsystems implemented in CMOS technology and integrated with silicon devices as well as II-VI semiconductors. In particular, she is interested in CMOS Image Sensors, and nuclear cameras based on arrays of CdZnTe gamma-ray spectrometers as well as in optical components for optical communication.

She has published approximately 130 papers in the open literature, has filed several patents and a large number of classified reports. She has collaborated with the microelectronics industry as a consultant in sensors and VLSI technology and has been quite active in national and international conferences. She has supervised over 40 graduate students for M.Sc and D.Sc.

She is an IEEE Fellow, an IEE Fellow and has been the chairperson of the Israeli Association for Crystal Growth. Currently she is the chairperson of the microelectronics and photonics section of URSI.

In the past she received awards as a "best teacher" at Technion, a national award of high esteem-"The Award for the Security of Israel" and a Technion award for "Novel Applied Research". She has received The Kidron Foundation award for "Innovative Applied Research" (a 100000$ grant for research program).

She is a distinguished lecturer of the electron device society of IEEE, the chairperson of the Israeli Association for Crystal Growth and the chairperson of the microelectronics and photonics section of URSI.

For about 20 years she has been active in Electro-optical devices in II-VI compound semiconductors and additional advanced semiconductor materials as well as infrared focal plane arrays. She has been involved in growth, processing, device design and modelling of detectors as well as VLSI circuits. She has been a principal investigator in large funded research programs that ended in prototype infrared detectors and systems that were transferred to industry. Currently her research focuses on silicon devices and micro-sensors; CMOS compatible micro machining and Microsystems implemented in CMOS technology as well as in II-VI nuclear detectors for imaging and spectroscopy. She has published close to 100 papers in the open literature and a large number of classified reports. She has collaborated with the microelectronics industry as a consultant in sensors and VLSI technology and has been quite active in national and international conferences. She has supervised over 30 graduate students for M. Sc. and D. Sc.

In the past she received awards as a "best teacher" at Technion, a national award of high esteem-"The Award for the Security of Israel", a Technion award for "Novel Applied research' and The Kidron Foundation award for "Innovative Applied Research".

Areas of research interest

Micromachining

Micro-electro-mechanical systems, or MEMS, is the name given to the coupling of mechanical and electronic devices. The MEMS microsystems are considered as a revolution since MEMS produce chips that can interact and communicate with the physical outer world.

In recent years, research has lead to the development of a technology called micromachining. With micromachining we can fabricate on a silicon chip sensors for practically everything as well as actuators that can move things and even motors. This is a significant revolution. In the 21st century micromachining of silicon and micromachined microsystems are expected to have even greater impact on society than the VLSI revolution.

In our research programs we focus on bulk as well as surface micromachining and in particular on CMOS compatible micromachining, where the VLSI readout and the micromachined devices are integrated on a silicon chip, which is fabricated with a standard CMOS technology.

The on going research programs include:

Inertial sensors with integrated optical sensing such as rate gyroscopes and accelerometers.
Micromachined uncooled infrared sensors.
pressure sensor for medical instrumentation
optical bench for communication
integrated multi-sensors for in vivo measurements in the brain
generic MIMOS sensors for ion sensing.

There is a pending patent and several papers, which report part of the results of these research programs.

Publications

O. Degani, D. J. Seter, E. Socher, S. Kaldor and Y. Nemirovsky, "Micromachined Accelerometer with Modulated Integrative Differential Optical Sensing", IEE -Electronics Letters, Vol. 34, No. 7, 2nd April 1998, pp. 654-655.
O. Degani, D.J. Seter, E. Socher, S. Kaldor and Y. Nemirovsky, "Optimal Design and Noise Considerations of Micromachined Vibrating Rate Gyroscope with Modulated Integrative Differential Optical Sensing", IEEE - Journal of Microelectromechanical Systems, Vol. 7, No.3, September 1998, pp. 329-338.
D.J. Seter, O. Degani, E. Socher, S. Kaldor, E. Scher and Y.Nemirovsky, "Charcterization of a Novel Micromachined Optical Vibrating Rate-Gyroscope", AIP – Review of Scientific Instruments, Vol. 70, No. 2, February 1999, pp. 1274-1276.
Ofir Degani, Dan J. Seter, Eran Socher and Yael Nemirovsky, "Comparative study of novel micromachined accelerometers employing MIDOS", Sensors and Actuators A: Physical, Vol. 80, 2000, pp. 91-99.
Ofir Degani, Dan J. Seter, Eran Socher and Yael Nemirovsky, "A novel micromachined vibrating rate-gyroscope with optical sensing and electrostatic actuation", Sensors and Actuators A: Physical, Vol. 83 (2000), pp. 54-60.
Ofir Bochobza-Degani, Dan J. Seter, Eran Socher and Yael Nemirovsky, "Design and Noise Consideration of an Accelerometer employing modulated integrative differential optical sensing", Sensors and Actuators A: Physical, Vol. 84 (2000), pp. 53-64.
a related paper is: Y. Nemirovsky, P. Muralt and N. Setter, ``Design of a Novel Thin Film Piezoelectric Accelerometer'', Sensors and Actuators, A56, pp. 239–249, (1996).
D. J. Seter, O. Degani, S. Kaldor, E. Scher, J. Rosenberg and Y.Nemirovsky, "Microelectromechanical Vibrating Inertial Sensors with Integrated Optical Sensing", Proceeding of GYRO-Technology Symposium, Stuttgart, Germany, 15-16 September 1998, pp. 10.0-10.13.
O. Degani, D.J. Seter, E. Socher, S. Kaldor, E. Scher and Y. Nemirovsky, "Comperative Study of Novel Accelerometers employing MIDOS", Proc. of IEEE - MEMS' 99, Orlando, USA, 17-21 January 1998, pp. 66-71.
O. Degani, D.J. Seter, E. Socher, S. Kaldor, E. Scher and Y. Nemirovsky, "Optically Sensed Cantilever Suspended Micromachined Inertial Sensor", Proc. of AGIL 98, Ramat-Gan, Israel, 25-26 November 1998, p. 40.
O. Bochobza-Degani, D. J. Seter, E. Socher and Y. Nemirovsky, “A Novel Micromachined Vibrating Rate Gyroscope with Optical Sensing and Electrostatic Actuation”, Tech. Dig. International Conf. Solid-State Sensors and Actuators (Transducers’99), Sendai, Japan, 7-10 June 1999.
E. Socher, O. Degani and Y. Nemirovsky, "Optimal Design and Noise Considerations of CMOS Compatible IR Thermoelectric Sensors", Sensors and Actuators A -Physical, Vol. 71, No. 1-2, November 1998, pp.107-115.
E. Socher, O. Degani and Y. Nemirovsky, “Optimal Performance of CMOS Compatible IR Thermoelectric Sensors”, Journal of Microelectromechanical Systems, Vol. 9(1), pp. 38–46.
E. Socher, O. Degani and Y. Nemirovsky, "Integrated Uncooled Micromachined Far-Infra-Red Thermoelectric Sensors for Thermal Imaging", Proc. of AGIL 98, Ramat-Gan, Israel, 25-26 November 1998, p. 78.
E. Socher, O. Bochobza-Degani, and Y. Nemirovsky, “Investigation of Integrated Micromachined Uncooled thermoelectric Sensors for Imaging Applications”, Tech. Dig. International Conf. Solid-State Sensors and Actuators (Transducers’99), Sendai, Japan, 7-10 June 1999.
O. Degani, E. Socher, A. Lipson, T. Lietner, D. J. Setter, S. Kaldor and Y. Nemirovsky, "Pull-in Study of an Electrostatic Torsion Micro-Actuator", IEEE - Journal of Microelectromechanical Systems, Vol. 7, No. 4, December 1998, pp. 373-379.
Y. Nemirovsky and O. Degani, “A Methodology and Model for the Pull-In parameters of Electrostatic Actuators”, submitted to JMEMS, January 2001.
O. Bochobza-Degani, D. J. Seter, E. Socher and Y. Nemirovsky, ”A generalized Pull-In condition in micromachined electrostatic actuators with a single degree of freedom”, AISEM’2000, Lecce, Italy, February 12-15, 2000.
O. Degani, E. Socher, Y. Yaniv and Y. Nemirovsky, “Modeling the Pull-In parameters of electrostatic actuators with a novel lumped two degrees of freedom pull-in model”, to be presented at Transducers’01/EurosensorsXV conf., Munich, June, 2001.
O. Degani and Y. Nemirovsky, “On the effect of residual charges on the pull-in parameters of electrostatic actuators”, to be presented at Transducers’01/ EurosensorsXV conf., Munich, June, 2001.
Y. Nemirovsky and A. El– Bahar, ``The Non Equilibrium Band Model of Silicon in TMAH and in Anisotropic Electrochemical Alkaline Etching Solutions'', Sensors and Actuators, 75, pp. 205–214 (1999).
C.G. Jakobson, I. Bloom and Y. Nemirovsky, “1/f Noise in CMOS Transistors for Analog Applications from Subthreshold to Saturation”, Solid State Electronics, 42(10), 1807-1817 (1998).
C.G. Jakobson and Y. Nemirovsky, “``CMOS Low Noise Switched Charge Sensitive Preamplifier for CdTe and CdZnTe X– Ray Detectors'', IEEE Trans. on Nuclear Science, 44(1), pp. 20–25, (1997).
Y. Nemirovsky, Igor Brouk and C.G. Jakobson, “1/f Noise in CMOS Transistors for Analog Applications”, submitted to IEEE Trans. on Electron Devices (2000).
C.G. Jakobson and Y. Nemirovsky, “1/f Noise in ISFETs from Subthreshold to Saturation”, IEEE Trans. on Electron Devices, January (1999).
C.G. Jakobson, Y. Nemirovsky and M. Feinsod, “Low Frequency Noise and Drift in Ion Sensitive Field Effect Transistors”, to be published in Sensors & Actuators (2000).